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TITLE: ION IMPLANTATION TECHNOLOGY 2010 : 18TH INTERNATIONAL CONFERENCE ON ION
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International Conference on Ion Implantation Technology (18th : 2010 : Kyoto, Japan)
Title
Ion implantation technology 2010 : 18th International Conference on Ion Implantation Technology, IIT 2010, Kyoto, Japan, 6-11 June 2010 / editors, Jiro Matsuo ... [et al.]
Imprint
Melville, N.Y. : American Institute of Physics, c2010
ISBN
9780735408760
0735408769
LOCATION
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OPACMSG
BARCODE
Physics Library
QC1 A512
v. 1321
AVAILABLE
30350000465040
Descript
xiv, 518 p. : ill. ; 28 cm
Series
AIP conference proceedings, 0094-243X ; 1321
AIP conference proceedings ; no. 1321
Note
Includes bibliographical references and author index
Subject
Ion implantation -- Congresses
Alt Author
Matsuo, Jiro
Alt Title
18th International Conference on Ion Implantation Technology
Eighteenth International Conference on Ion Implantation Technology
IIT 2010
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